A sensor includes a substrate 1 and at least one resonator, which includes
an acoustic reflector 2, a piezoelectric layer 5, a first and second
electrode 3, 4 placed on the same side of the piezoelectric layer 5, and
a sensing layer 6. The sensing layer 6 reacts with a chemical or
biological agent by absorption, adsorption, desorption or chemical
reaction. As a result the individual frequency of a resonator changes and
conclusions about the agent can be drawn. Such a sensor is very sensitive
to an agent being sensed, especially when used in liquids.