An exposure apparatus which includes a projection optical system
configured to project light from an original onto a substrate and
performs an exposure of the substrate to light via a liquid that fills a
gap between a final optical element of the projection optical system and
the substrate, the apparatus comprises a controller configured so that 1)
an exposure condition for the substrate is input to the controller, the
exposure condition including a shot area layout and a dose for a shot
area, and 2) the controller obtains a contact time during which the shot
area is to be kept in contact with the liquid based on the input exposure
condition, and corrects the input dose based on the obtained contact
time.