A method is provided for fabricating a memory device. A semiconductor
substrate is provided which includes a first well region having a first
conductivity type, a second well region having the first conductivity
type, a first gate structure overlying the first well region and the
second gate structure overlying the second well region. An insulating
material layer is conformally deposited overlying exposed portions of the
semiconductor substrate. Photosensitive material is provided over a
portion of the insulating material layer which overlies a portion of the
second well region. The photosensitive material exposes portions of the
insulating material layer. The exposed portions of the insulating
material layer are anisotropically etched to provide a sidewall spacer
adjacent a first sidewall of the second gate structure, and an insulating
spacer block formed overlying a portion of the second gate structure and
adjacent a second sidewall of the second gate structure. A drain region
and a source/base region are formed in the semiconductor substrate
adjacent the first gate structure and a cathode region is formed in the
semiconductor substrate adjacent the second gate structure. The drain
region, the source/base region, and the cathode region have a second
conductivity type. An anode region of the first conductivity type is
formed adjacent the second gate structure in a portion of the source/base
region.