A semiconductor device including a lateral field-effect transistor and
Schottky diode and method of forming the same. In one embodiment, the
lateral field-effect transistor includes a buffer layer having a contact
covering a substantial portion of a bottom surface thereof, a lateral
channel above the buffer layer, another contact above the lateral
channel, and an interconnect that connects the lateral channel to the
buffer layer. The semiconductor device also includes a Schottky diode
parallel-coupled to the lateral field-effect transistor including a
cathode formed from another buffer layer interposed between the buffer
layer and the lateral channel, a Schottky interconnect interposed between
the another buffer layer and the another contact, and an anode formed on
a surface of the Schottky interconnect operable to connect the anode to
the another contact. The semiconductor device may also include an
isolation layer interposed between the buffer layer and the lateral
channel.