Generally, the process includes depositing a barrier layer and seed layer
on a feature formed in a dielectric layer, performing a grafting process,
initiating a copper layer and then filing the feature by use of a bulk
copper fill process. Copper features formed according to aspects
described herein have desirable adhesion properties to a barrier and seed
layers formed on a semiconductor substrate and demonstrate enhanced
electromigration and stress migration results in the fabricated devices
formed on the substrate.