A lithographic apparatus including a projection system configured to
project a patterned radiation beam onto a target portion of a substrate
includes a position measuring system configured to determine the position
of a movable object in at least one direction. The measuring system
includes at least a first sensor arranged spaced from one side of the
object and at least a second sensor arranged spaced from an opposite side
of the movable object, and a calculation device configured to calculate
the position of the object on the basis of distances measured by the
first sensor and the second sensor between the first and the object and
the second sensor and the object, respectively. By using the (weighted)
difference between measured signals for calculation of the position of
the object, the errors in the sensor signals caused by disturbances, such
as global and/or local changes of the refractive index and expansion can
be substantially reduced.