A surface inspection system, as well as related components and methods,
are provided. The surface inspection system includes a beam source
subsystem, a beam scanning subsystem, a workpiece movement subsystem, an
optical collection and detection subsystem, and a processing subsystem.
The signal processing subsystem comprises a series of data acquisition
nodes, each dedicated to a collection detection module and a plurality of
data reduction nodes, made available on a peer to peer basis to each data
acquisition nodes. Improved methods for detecting signal in the presence
of noise are also provided.