It is an object of the present invention to provide an easy doping method
where concentration control is easy, where doping with respect to a large
area can be practically conducted and which does not require a special
device. The present invention provides a laser doping method where a
liquid including a dopant is applied to the surface of a semiconductor
that is to be doped and the surface of the semiconductor is irradiated
with laser light to add the dopant to the semiconductor. It is also
possible to conduct crystallization at the same time.