The present invention relates to novel unsaturated polycyclic compounds
containing two fluoroalcohol substitutents. This invention also relates
to homopolymers and copolymers derived from such unsaturated polycyclic
compounds. The copolymers are useful for photoimaging compositions and,
in particular, photoresist compositions (positive-working and/or
negative-working) for imaging in the production of semiconductor devices.
The polymers are especially useful in photoresist compositions having
high UV transparency (particularly at short wavelengths, e.g., 157 nm)
which are useful as base resins in resists and potentially in many other
applications.