A thermal processing chamber includes a substrate support rotating about a
center axis and a lamphead of plural lamps in an array having a
predetermined difference in radiance pattern between them. The radiance
pattern includes a variation in diffuseness or collimation. In one
embodiment, the center lines of all of the lamps are disposed away from
the center axis. The array can be an hexagonal array, in which the center
axis is located at a predetermined position between neighboring lamps.