A phase change memory device with improve thermal isolation. The device
includes an electrode stack, including a first and second electrode
elements, generally planar in form, separated by and in mutual contact
with a dielectric spacer element, wherein the electrode stack includes a
side surface; a phase change element having a bottom surface in contact
with the electrode stack side surface, including electrical contact with
the first and second electrode elements; and dielectric fill material
surrounding and encasing the memory device, wherein the dielectric fill
material is spaced from the phase change element, such that the phase
change element and the dielectric fill material define a cavity adjacent
the phase change element, and wherein the cavity contains a low pressure
environment.