The present invention is directed to a switch circuit and method to
quickly enable or disable the ion beam to a wafer within an ion
implantation system. The beam control technique may be applied to wafer
doping repaint and duty factor reduction. The circuit and method may be
used to quench an arc that may form between high voltage electrodes
associated with an ion source to shorten the duration of the arc and
mitigate non-uniform ion implantations. The circuit and method
facilitates repainting the ion beam over areas where an arc was detected
to recover dose loss during such arcing. A high voltage high speed
switching circuit is added between each high voltage supply and its
respective electrode to quickly extinguish the arc to minimize disruption
of the ion beam. The high voltage switch is controlled by a trigger
circuit which detects voltage or current changes to each electrode.
Protection circuits for the HV switch absorb energy from reactive
components and clamp any overvoltages.