A transparent oxide electrode film is provided to have crystalline indium
oxide as its main component, in which the indium in the indium oxide is
substituted with titanium at a titanium/indium atomic ratio between 0.003
and 0.120, and the resitivity of the transparent oxide electrode film is
5.7.times.10.sup.-4 .OMEGA.cm or less, so as to provide excellent
transmittance for both the visible light region and the infrared light
region, and low resistivity.