An optical filter is formed of a layer stack that includes metallic layers
and dielectric layers, with at least one dielectric layer being defined
by more than one zinc-based film. These zinc-based films have different
percentages of zinc. The selections of the percentages are based upon the
positions of the films within the dielectric layer. An unexpectedly low
sheet resistance is available if the zinc-based film that immediately
precedes forming a metallic layer has a percentage of zinc in the range
of 80 percent to next to 100 percent. Process stabilization and
manufacturing cost are provided by placing the percentage of the lower
zinc-based film closer to 50 percent (25-75). Process stabilization is
further enhanced by providing an indium-based film within the dielectric
layer adjacent to the metallic layer.