An object of the present invention relates to detecting a target substance with high contrast. The invention relates to analysis of a target substance using a light-transmitting substrate and a metal for inducing plasmon resonance, and further using a low refractive index layer with an opening portion, which forms an interface with the substrate, and which has a lower refractive index than the substrate. Light emitted from a substrate side is totally reflected at the interface to irradiate the metal arranged in the opening portion with evanescent light. Light generated from the target substance by plasmon resonance of the evanescent light is detected. According to the invention, the radiation of evanescent light to a martial other than the target substance can be reduced, and thereby light emission from the martial other than the target substance, e.g., a molecule floating around the target substance, can be reduced.