A positive resist composition comprising (A) a resin component and (B) an
acid generator component, wherein the component (A) is a copolymer which
comprises constituent units (a1) derived from a mono(.alpha.-lower
alkyl)acrylate having an acid-dissociable dissolution-inhibiting group,
constituent units (b1) derived from a mono .alpha.-lower alkyl)acrylate
having a lactone ring, and constituent units (c1) derived from a
poly(.alpha.-lower alkyl)acrylate; and a positive resist composition
comprising (A) a resin component and (B) an acid generator component,
wherein the component (A) is a star polymer having a core containing
acid-dissociable dissolution-inhibiting groups and arms bonded to the
core.