The present invention is related to a chemical-mechanical polishing slurry
for shallow trench isolation, more concretely, to a chemical-mechanical
polishing slurry comprising an aqueous abrasive solution comprised of
deionized water, polishing particles, and a polishing particle
dispersant; and an aqueous additive solution comprised of a carboxylic
acid polymer compound, a nitrogen-containing organic cyclic compound, and
an amine-group compound. The removal selectivity of the slurry may be
improved by significantly lowering the speed of polishing of nitride film
by adding a nitrogen-containing organic cyclic compound to an acrylic
acid polymer compound, and by increasing the speed of removal of silicon
oxide film by adding an amine-group compound, which is an accelerator of
hydrolysis of silicon oxide film.