A cooled electronic module and method of fabrication are provided
employing a cooling apparatus for removing heat from one or more
electronic devices disposed on a substrate. The cooling apparatus
includes a supply manifold structure having a plurality of inlet orifices
for injecting coolant onto a surface to be cooled, and a return manifold
structure. The return manifold structure, which is fabricated of a
thermally conductive material, has a base surface sealed to the surface
to be cooled along a periphery thereof employing a thermally conductive,
coolant-tight seal. The return manifold structure provides at least one
return passageway for exhausting coolant after impinging on the surface
to be cooled, wherein coolant exhausting through the at least one
passageway cools the return manifold structure, thereby facilitating
further cooling of the surface to be cooled in a region where the base
surface is sealed to the surface to be cooled.