A piezoelectric actuator includes a vibration plate covering pressure
chambers and serving also as a common electrode, a piezoelectric layer
arranged entirely on the upper surface of the vibration plate, an
insulating layer formed entirely on upper surfaces of individual
electrodes and the piezoelectric layer, and wirings formed on the upper
surface of the insulating layer. A through hole is formed in the
insulating layer at an area facing both one of the individual electrodes
and one of the wirings, and the individual electrode and the wiring are
connected by an electroconductive material filled in the through hole.
With this, both the simplification of structure of electric contact and
the improvement in reliability of electric connection can be realized,
and a piezoelectric actuator is capable of suppressing the generation of
excessive electrostatic capacitance during the application of drive
voltage can be provided.