Disclosed are a light absorbent agent polymer for organic anti-reflective
coating which can prevent diffused light reflection of bottom film layer
or substrate and reduce standing waves caused by a variation of thickness
of the photoresist itself, thereby, increasing uniformity of the
photoresist pattern, in a process for forming ultra-fine patterns of
photoresist for photolithography by using 193 nm ArF among processes for
manufacturing semiconductor devices, and its preparation method. Also,
the present invention discloses an organic anti-reflective coating
composition comprising a light absorbent agent polymer for the organic
anti-reflective coating and a pattern formation process using the coating
composition.