A corrosion-resistant silicon nitride ceramics in which an adhesion
enhancing layer (3), a stress relaxing layer (4) and a crack extension
preventing layer (5) are laminated in this order on a ceramic substrate
(2) composed mainly of silicon nitride, and a surface corrosion-resistant
layer (6) composed mainly of zirconium oxide stabilized by an element of
the group 3a of the periodic table is laminated. The thermal expansion
coefficient (.alpha..sub.0) of the ceramic substrate (2), the thermal
expansion coefficient(.alpha..sub.1) of the adhesion enhancing layer (3),
and the thermal expansion coefficient (.alpha..sub.2) of the stress
relaxing layer (4), the thermal expansion coefficient (.alpha..sub.3) of
the crack extension preventing layer (5), and the thermal expansion
coefficient (.alpha..sub.4) of the surface corrosion-resistant layer (6)
satisfy the following relational expressions (I) to (III):
.alpha..sub.0.apprxeq..alpha..sub.1 (I) .alpha..sub.3<.alpha..sub.2
(II) .alpha..sub.3<.alpha..sub.4 (III).