An intravascular pressure sensor assembly is disclosed herein that is
produced in part using photolithography and DRIE solid-state device
production processes. Using DRIE production processes facilitates a
number of features that could not be readily incorporated in sensor chips
fabricated using mechanical saws. In accordance with a first feature,
sensor chips are created with non-rectangular outlines. The sensor chip
includes a widened portion that substantially abuts an inner wall of a
sensor housing, and a cantilevered portion that is relatively narrow in
relation to the widened portion. The non-rectangular outline of the
sensor chip is formed using photolithography in combination with DRIE
processing. In accordance with another feature, the sensor chip is
positioned width-wise in the housing, thereby reducing a required length
for the housing. In accordance with yet another feature, the sensor chip
comprises one or more cutouts for receiving signal wires for connection
to signal lead lines on the sensor chip. The outline of the sensor chip
and the cutouts are formed using photolithography in combination with
DRIE processing.