A system and method are disclosed for determining the effective channel
width (Weff) and the effective channel length (Leff) of metal oxide
semiconductor devices. One advantageous embodiment of the method provides
a plurality of metal oxide semiconductor field effect transistor
capacitors in which each capacitor has a same value of drawn channel
length but a different value of drawn channel width. A value of
Fowler-Nordheim tunneling current is measured from each capacitor.
Channel width offset is the difference between the drawn channel width
and the effective channel width. A value of channel width offset is
obtained from the measured values of the Fowler-Nordheim tunneling
currents and used to determine the value of effective channel width. A
similar method is used to determine the value of the effective channel
length.