A semiconductor wafer assembly includes a base of dielectric. A layer of
silicon is deposited thereover. A metal hard mask is deposited over the
silicon. A dielectric hard mask is deposited over the metal hard mask.
Photoresist is deposited over the dielectric hard mask, whereby a
plurality of sacrificial columns is formed from the layer of metal hard
mask through the photoresist such that the sacrificial columns extend out
from the silicon layer. An interface layer is disposed between the layer
of conductive material and the layer of hard mask to enhance adhesion
between each of the plurality of sacrificial columns and the layer of
conductive material to optimize the formation of junction diodes out of
the silicon by preventing the plurality of sacrificial columns from being
detached from the layer of silicon prematurely due to the sacrificial
columns peeling or falling off.