Low-pressure drop thermal assemblies, systems and methods of making
low-pressure drop thermal assemblies for use in high power flux
situations. A manifold body is attached to a distributor to form a
subassembly. This subassembly is in communication with a substrate
surface, which has a semiconductor device in need of thermal management
thereon. An enclosed cavity is formed between the target substrate
surface and the subassembly, and a seal of the cavity protects critical
components residing on the active surface of the semiconductor device.
The distributor includes a distributed liquid impingement microjet inlet
array isolated from and parallel with a distributed microjet drain array
for impinging cooling fluid and removing spent heated fluid in a
direction orthogonal to a target surface for maximizing the heat transfer
rate, and thereby providing high cooling flux capabilities while enabling
low-pressure drops.