It is an object of the present invention to provide a mapping-data
analyzing method that can display a map in which sufficient information
is extracted from the spectra of obtained mapping data to enable
objective analysis. The mapping-data analyzing method of the present
invention is used for analyzing mapping data obtained by measuring, with
a spectrometer apparatus, spectra at a plurality of points on a specimen
surface. The method comprises a principal-component calculating step and
a grouped-map display step. In the principal-component calculating step,
spectral data obtained at each point on the specimen surface is defined
as an individual sample and principal component analysis, in which values
at a plurality of wave numbers of each spectral data set serve as
variables, is performed to calculate the scores of a plurality of
principal components for each individual sample. In the grouped-map
display step, the points on the specimen surface are divided into a
plurality of groups based on the scores of a plurality of principal
components calculated in the principal-component calculating step and a
two-dimensional or three-dimensional map indicating to which group each
point on the specimen surface belongs is displayed on a display device.