A technique for manufacturing a light-emitting device by using a method of forming a thin film having a highly uniform thickness with high throughput is provided. The technique includes the steps of filling a small molecular organic electroluminescence material into an evaporation cell that has an orifice-like evaporation material ejecting port, and heating the small molecular organic electroluminescence material in an inert gas atmosphere to form a light emitting layer on a substrate from the small molecular organic electroluminescence material.