A method of making a micro corner cube array includes the steps of:
preparing a substrate, at least a surface portion of which consists of
cubic single crystals and which has a surface that is substantially
parallel to {111} planes of the crystals; and etching the surface of the
substrate anisotropically, thereby forming a plurality of unit elements
for the micro corner cube array on the surface of the substrate. Each of
these unit elements is made up of a number of crystal planes that have
been formed at a lower etch rate than the {111} planes of the crystals.