A method of manufacturing a semiconductor device characterized by its
high-speed operation and high reliability is provided in which a
semiconductor layer crystallized by a CW laser is used for an active
layer of a TFT. When a semiconductor layer is crystallized by a CW laser,
one part is formed of large crystal grains whereas another part is formed
of microcrystals due to the width-wise energy density distribution. The
former exhibits excellent electric characteristics. The latter has poor
electric characteristics because grain boundaries hinder movement of
electric charges, and therefore causes inconveniences when used as an
active layer of a transistor. Accordingly, circuits are arranged such
that a semiconductor layer formed of large crystal grains is used for the
active layer of every TFT.