A method for fabricating a floating gate of the flash memories is
described. A pad oxide layer and a silicon nitride layer are formed
sequentially on a substrate. A plurality of shallow trenches is formed in
the substrate and an active area is defined by the shallow trenches. The
silicon nitride layer is pulled back by isotropic etching to expose the
corner of the trench. A corner-rounding process is performed to round the
corner. An STI structure is formed in the shallow trench. Thereafter, the
pad oxide layer and the silicon nitride layer are removed. A tunneling
oxide layer and a first polysilicon layer are formed sequentially on the
active area and the first polysilicon layer is as high as the STI
structure. A second polysilicon layer is formed on the first polysilicon
layer and the STI structures. A portion of the second polysilicon layer
on the STI structure is removed to form the floating gate.