A method of forming a densified nanoparticle thin film in a chamber is disclosed. The method includes positioning a substrate in the chamber; and depositing a nanoparticle ink, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30.degree. C. and about 300.degree. C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed. The method further includes exposing the porous compact to an HF vapor for a second time period of between about 2 minutes and about 20 minutes, and heating the porous compact for a second temperature of between about 25.degree. C. and about 60.degree. C.; and heating the porous compact to a third temperature between about 100.degree. C. and about 1000.degree. C., and for a third time period of between about 5 minutes and about 10 hours; wherein the densified nanoparticle thin film is formed.