The invention relates to a surface penetration device, a method to use the device, and an analyte monitor. Embodiments of the surface penetration device include a substrate with first and second surfaces, and first and second tissue piercing elements, the elements differing in configuration, but each associated with the first surface of the substrate. At least some of the tissue piercing elements have a distal and a proximal opening and a lumen extending between the openings. The proximal openings are in fluid communication with an opening in the second surface of the substrate. Embodiments of the analyte monitor include the features of the penetration device plus an analyte sensor that detects an analyte in a fluid. Embodiments of the method of penetrating tissue include providing a surface penetration device and urging the surface penetration device against a tissue surface until some of the first and second tissue piercing elements penetrate the tissue surface.