The invention provides a method of detecting a chemical species with an
oscillating cantilevered probe. A cantilevered beam is driven into
oscillation with a drive mechanism coupled to the cantilevered beam. A
free end of the oscillating cantilevered beam is tapped against a
mechanical stop coupled to a base end of the cantilevered beam. An
amplitude of the oscillating cantilevered beam is measured with a sense
mechanism coupled to the cantilevered beam. A treated portion of the
cantilevered beam is exposed to the chemical species, wherein the
cantilevered beam bends when exposed to the chemical species. A second
amplitude of the oscillating cantilevered beam is measured, and the
chemical species is determined based on the measured amplitudes.