A test structure for electromigration and related method are disclosed.
The test structure may include an array of a plurality of multilink test
sets, each multilink test set including a plurality of metal lines
positioned within a dielectric material and connected in a serial
configuration; each multilink test set being connected in a parallel
configuration with the other multilink test sets, the parallel
configuration including a first electrical connection to a cathode end of
a first metal line in each multilink test set and a second electrical
connection to an anode end of a last metal line in each multilink test
set.