A liquid material vaporizer comprises a gas-liquid mixing section (1) for
mixing a liquid material (LM) and a carrier gas (CG) to generate a
gas-liquid mixture (GL); a heating type vaporizing section (2) for
vaporizing the gas-liquid mixture (GL) from the gas-liquid mixing section
(1) and exhausting outside with an assistance of the carrier gas (CG) a
gas generated by the vaporization; a connecting section (3) for making a
connection between the gas-liquid mixing section (1) and the vaporizing
section (2), the connecting section (3) having inside a flow path for the
gas-liquid mixture (GL); and a connecting section cooling section (4) for
cooling the connecting section (3). Thus, the liquid material vaporizer
which performs suitable vaporization by preventing residue from being
generated even in the case of vaporizing a liquid material composed of a
plurality of materials having different boiling points.