A liquid material vaporizer comprises a gas-liquid mixing section (1) for mixing a liquid material (LM) and a carrier gas (CG) to generate a gas-liquid mixture (GL); a heating type vaporizing section (2) for vaporizing the gas-liquid mixture (GL) from the gas-liquid mixing section (1) and exhausting outside with an assistance of the carrier gas (CG) a gas generated by the vaporization; a connecting section (3) for making a connection between the gas-liquid mixing section (1) and the vaporizing section (2), the connecting section (3) having inside a flow path for the gas-liquid mixture (GL); and a connecting section cooling section (4) for cooling the connecting section (3). Thus, the liquid material vaporizer which performs suitable vaporization by preventing residue from being generated even in the case of vaporizing a liquid material composed of a plurality of materials having different boiling points.

 
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