A memory device is fabricated with a graded composition tunnel insulator
layer. This layer is formed over a substrate with a drain and a source
region. The tunnel insulator is comprised of a graded SiC--GeC--SiC
composition. A charge blocking layer is formed over the tunnel insulator.
A trapping layer of nano-crystals is formed in the charge blocking layer.
In one embodiment, the charge blocking layer is comprised of germanium
carbide and the nano-crystals are germanium. The thickness and/or
composition of the tunnel insulator determines the functionality of the
memory cell such as the volatility level and speed. A gate is formed over
the charge blocking layer.