Microelectromechanical systems (MEMS) include critical devices for various
highly sensitive applications. However, MEMS operation may be impaired by
vibration. A modular vibration control pedestal for integration with a
MEMS is provided according to embodiments of the present invention which
includes a piezoelectric perovskite oxide disposed on a substrate and a
shape memory alloy component component disposed on the piezoelectric
perovskite oxide. In particular embodiments of a MEMS device including a
modular VCP, vibration is reduced by at least 50%.