The position detection apparatus includes a light projecting optical
system which has an optical axis, and which cause two light beams
symmetrical about the optical axis to enter a substrate, a light
receiving optical system which receives the two light beams which have
emerged from the light projecting optical system and are reflected by the
substrate, a light receiving unit which is arranged at a position shifted
in the optical axis direction, a detection unit which respectively
detects the positions of the two light beams which have entered the light
receiving unit, and a calculator which calculates the surface position of
the substrate in the normal direction based on the positions of the two
light beams, which are detected by the detection unit. At least one of
the light projecting optical system and the light receiving optical
system is shared for the two light beams.