Systems and methods for forming an electrostatic MEMS switch include
forming a cantilevered beam on a first substrate, forming the electrical
contacts on a second substrate, and coupling the two substrates using a
hermetic seal. The hermetic seal may be a gold/indium alloy, formed by
heating a layer of indium plated over a layer of gold. Electrical access
to the electrostatic MEMS switch may be made by forming vias through the
thickness of the second substrate.