A method capable of synthesizing carbon nanotubes at low cost and large
quantities, an apparatus usable for carrying out the method, and carbon
nanotubes densely aligned on and firmly bonded to a Si substrate over,
and oriented perpendicular to, an entire surface thereof are provided.
Highly oriented, aligned carbon nanotubes are synthesized from an organic
liquid by forming a substrate with a buildup thereon of a thin film or
fine insular particles composed of at least one metallic element;
exposing the substrate (3) having the buildup to a hydrogen plasma; and
heating the substrate (3) exposed to the hydrogen plasma in the organic
liquid (10) to a predetermined temperature. The synthesis apparatus
comprises: a liquid chamber or tank (1) for an organic liquid; a water
cooling means (2) for cooling the liquid tank (1) from its outside; a
substrate holder (5) for holding a substrate (3), the holder having
electrodes (4) for passing an electric current through the substrate (3);
a condensing means (7) comprising water cooling tubes (6) for cooling and
condensing vapor made from the organic liquid by its vaporization to
return it to the liquid for return into the liquid tank (1); a valve (8)
through which N.sub.2 gas is introduced; and a lid (9) that carries the
substrate holder (5), the condensing means (7) and the valve (8). The
organic liquid (10) is thus tightly sealed in the liquid tank (1) by the
lid (9). This synthesis apparatus allows carbon nanotubes to be
synthesized in large quantities, at low cost and in safety. Highly
coaxially and densely oriented, aligned carbon nanotubes can be
synthesized in the form of a bundle thereof, which when used in a variety
of products brings about various excellent effects including extremely
high usability.