A parameter adjusting device and a parameter adjusting method configured
to adjust a great number of parameters used for a circuit design model of
a semiconductor element such as a transistor within a short time. A
parameter adjusting device adapts a circuit design model wherein a
formula for analysis is derived based on a surface potential such as, for
example, the HiSIM, as the circuit design model of a semiconductor
element; defines a chromosome wherein a respective great number of
parameters of the model are genes; and optimizes the parameter based on
property measured data of a tested element, using a genetic algorithm.
Parameter adjustment comprises a first step adjusting the parameters
which determine the structure of the semiconductor element based on the
property measured data of a long channel group; and a second step
adjusting nonadjusted parameters based on the property measured data of
various lengths of channels with reference to a result of the first step.
Adjustment of the optimum parameters within a short time and with a high
degree of accuracy, which was conventionally difficult, can be performed.