A method for converting data includes generating a first data vector of
data measurements related to processing of at least one workpiece. Each
element of the first data vector is associated with at least one of a
plurality of positions on the workpiece. A cumulative distribution of the
elements in the first data vector is generated. An outlier region of the
data measurements is identified based on the cumulative distribution. A
binary outlier data vector is generated from the first data vector by
assigning a first binary value to the data elements in the first data
vector in the outlier region and assigning a second binary value to the
remaining data elements in the first data vector.