A positive type resist composition for use in liquid immersion exposure
comprises: (A) a resin having a monocyclic or polycyclic cycloaliphatic
hydrocarbon structure, the resin increasing its solubility in an alkali
developer by an action of acid; (B) a compound generating acid upon
irradiation with one of an actinic ray and a radiation; (C) an alkali
soluble compound having an alkyl group of 5 or more carbon atoms; and (D)
a solvent.