A laser irradiation apparatus and a method of laser irradiation which can
improve use efficiency of a laser beam, eliminate an influence of stray
light at a DMD, and form an irradiation pattern with a homogeneous beam
spot are provided. The laser irradiation apparatus includes at least a
laser oscillator, a diffractive optical element, and an optical element
having many minute mirrors arranged two-dimensionally. A laser beam
emitted from the laser oscillator is divided into plural laser beams by a
diffractive optical element and the laser beams are deflected by plural
micromirrors. The divided laser beams have equal energy to each other.