An exposure apparatus for exposing a pattern of a reticle onto a plate
includes a projection optical system for projecting the pattern onto the
plate, a switch for switching a polarization of a light for illuminating
the reticle from a first polarization state to a second polarization
state different from the first polarization state, and an adjuster for
adjusting an aberration of the projection optical system when the switch
switches the polarization of the light from the first polarization state
to the second polarization state.