A method and system for controlling the temperatures of at least one gas
in a plasma processing environment prior to the at least one gas entering
a process chamber. This temperature control may vary at different spatial
regions of a showerhead assembly (either an individual gas species or
mixed gas species). According to one embodiment, an in-line heat
exchanger alters (i.e., increases or decreases) the temperature of
passing gas species (either high- or low-density) prior to entering a
process chamber, temperature change of the gases is measured by
determining a temperature of the gas both upon entrance into the in-line
heat exchanger assembly and upon exit.