A method for fabricating semiconductor components includes the step of
providing a semiconductor substrate having a circuit side, a back side, a
plurality of integrated circuits on the circuit side, and a plurality of
substrate contacts on the circuit side in electrical communication with
the integrated circuits. The method also includes the steps of forming
vias from the back side to the substrate contacts, forming a conductive
layer in the vias and on the back side in electrical contact with the
substrate contacts; and forming the conductive layer on the back side
into a plurality of conductors in electrical communication with the
substrate contacts. The semiconductor component includes the
semiconductor substrate, the through interconnects and the redistribution
conductors. Each through interconnect includes a via aligned with a
substrate contact, and a conductive layer at least partially lining the
via in physical and electrical contact with the substrate contact. Each
conductor is formed by a portion of the conductive layer.