An apparatus for measuring plasma electron density precisely measures
electron density in plasma even under a low electron density condition or
high pressure condition. This plasma electron density measuring apparatus
includes a vector network analyzer in a measuring unit, which measures a
complex reflection coefficient and determines a frequency characteristic
of an imaginary part of the coefficient. A resonance frequency at a point
where the imaginary part of the complex reflection coefficient is
zero-crossed is read and the electron density is calculated based on the
resonance frequency by a measurement control unit.