Disclosed are an automated data analysis system and method. They system
provides a standardized data analysis request form that allows a user to
select an experiment (e.g., a wafer-level based yield split lot (EWR)
analysis, a lot-level based process change notification (PCN) analysis,
and lot-level based tool/mask qualification analysis) and a data analysis
for a specific process module of interest. For each specific data
analysis request, the system identifies critical test parameters, which
are grouped depending on in-line test levels and photolithography levels.
The system links the analysis request to test data sources and
automatically monitors the test data sources, searching for the critical
test parameters. When the critical test parameters become available, the
system automatically performs the requested analysis, generates a report
of the analysis and publishes the report with optional drill downs to
more detailed results. The system further provides automatic e-mail
notification of the published report.