An imaging apparatus includes: a three-dimensional substrate in which a
partition wall (11) having an opening (10a) at a central portion is
formed so as to cross an inner cavity; an optical filter (5) that is
fixed on a first flat surface (12) of both surfaces of the partition wall
so as to cover the opening; a semiconductor imaging device (4) that is
face-down mounted on a second flat surface (13) of the partition wall
with an imaging area (4a) facing the opening; and an optical system for
forming images that is installed on a side of the optical filter in the
inner cavity of the three-dimensional substrate. The opening of the
partition wall is dosed on both sides with the optical filter and the
semiconductor imaging device so as to form a cavity. An air passage (12a)
for allowing communication between the cavity and an exterior of the
three-dimensional substrate is formed on the first flat surface, and has
a labyrinth structure that causes a flow rate of air passing through the
air passage to vary depending on a location in the air passage. This
allows air circulation between the exterior and a cavity enclosed by a
semiconductor imaging device and an optical filter, while suppressing the
entry of foreign matter from the exterior into the cavity via an airflow
caused by expansion/contraction of air.